Proċess ta 'tindif tajjeb għall-kisi tal-fidda bil-vakwu jista' jtejjeb il-pressjoni aħħarija tat-tagħmir
Ħalli messaġġ
Proċess ta 'tindif tajjeb għall-kisi tal-fidda bil-vakwu jista' jtejjeb il-pressjoni aħħarija tat-tagħmir
During the use of vacuum coating equipment, parts will also be contaminated. This contamination is related to the conditions of use and the vacuum pump. For example: the inner wall of the vacuum coating machine will be polluted by the evaporation material; the mechanical pump oil of the vacuum pumping unit of the vacuum coating equipment is the source of pollution, and the equipment will form an obvious oil film inside the equipment after long-term operation. These contaminations will also affect the performance of the equipment and should be removed at any time. Especially the ultra-high vacuum multi-target magnetron + ion beam combined sputtering equipment, its ultimate pressure is 6.6x10-Pa, and the equipped vacuum pumping group is an ultra-high vacuum system. In ultra-high vacuum systems, the cleaning process is even more important. A good cleaning process can reduce material outgassing rates by orders of magnitude. For example, after the stainless steel is exposed to the atmosphere for a long time, without any treatment, the gas output rate after pumping for 1 hour is 2.7x10-Pa-L/s m2), and it can be reduced to 1.3x10-Pa-L/ after pumping for 4 hours after removing oil stains. Csm). After baking at 250℃ for 15h, the outgas rate is further reduced to 1.3x10-Pa-L/(sm>. Proċess ta 'tindif tajjeb jista' jżid il-pressjoni aħħarija tat-tagħmir.
Il-materjal tal-kamra tal-vakwu għall-kisi tal-fidda bil-vakwu huwa l-aktar l-istainless steel
Il-materjal tal-kamra tal-vakwu tas-sistema tal-vakwu ultra-għoli huwa l-aktar azzar li ma jissaddadx, li huwa estremament importanti għat-tindif tal-istainless steel. It-tindif huwa li jnaqqas il-fiżisorbiment u l-kimiassorbiment tal-gassijiet fuq l-uċuħ tal-istainless steel. Wiċċ mhux nadif ta 'l-istainless steel huwa osservat minn spettrometru tal-jone sekondarju u spettrometru Auger. It-tniġġis ewlieni huwa l-karbonju u l-komposti tiegħu, li jappartjenu għall-materja organika. Għalhekk, l-użu ta 'diversi solventi kimiċi biex jitneħħew organiċi tal-wiċċ u karburi huwa metodu komuni.
www.superbheater.com
